Design the Film Bulk Acoustic Resonator (FBAR) Filter for Wireless Applications

The RF band pass filters are important for wireless communication applications. They can be realized using Thin Film Bulk Acoustic Resonator (TFBAR).TFBAR is designed using Zinc Oxide (ZnO) and electrodes of piezoelectric material are made with Aluminium (Al). Various modelling techniques has been used for realizing three layered TFBAR structure. Modified Butter worthvan Dyke model (MBVD) is one used for numerical simulation of ZnO film and thin electrodes. The proposed design is realized by connecting two series and one shunt FBARs in ladder configuration. In the paper, the filter has been designed for a bandwidth of 176 MHz at 3 dB. The minimum insertion loss of -2.925 dB and out of band rejection of -10.807 dB are obtained.